Jim Fraser Technical Services - Wafer Fabrication Courses
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    • Ion Implantation
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    • Chemical Vapour Deposition (CVD)
    • Statistical Process Control (SPC)
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Chemical Vapour Deposition (CVD)

Course Description

As the number and variety of thin films employed in the manufacture of advanced silicon ICs continues to grow dramatically, CVD plays an ever-expanding role.  This full-day on-site course examines the several types of CVD processes and each of the huge assortment of films deposited by CVD in conventional silicon wafer fab processes.  Topics covered include
  • CVD basics – e.g., heterogeneous vs. homogeneous reactions, mass-transport-limited vs. surface reaction rate-limited processes
  • generic CVD process mechanisms
  • types of CVD processes – e.g., APCVD, LPCVD, PECVD
  • CVD films – epitaxial silicon, polycrystalline silicon, silicon nitride, silicon oxynitrides, silicon oxide, tungsten, refractory metal silicides and nitrides, low-k dielectrics, high-k dielectrics 
  • trade-offs of different processes and different chemistries
  • achieving optimal step coverage
  • CVD equipment architecture
  • ALD (atomic layer deposition)

Who Should Attend

This course is designed for semiconductor industry professionals who wish to enhance or update their knowledge of CVD.  These include
  • process engineers and technicians
  • equipment engineers and technicians
  • process integration engineers
  • yield engineers
  • production supervisors
  • technical managers
  • equipment/materials sales/marketing experts

Course Notes

A comprehensive, detailed course manual is provided.

Course Fee and Additional Information

To schedule this course at your site or for additional information, including course fees, please contact the course instructor.
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  • Home
  • Courses
    • Wafer Fab Process Technology (4- or 5-day intensive course) >
      • Course reviews
    • Ion Implantation
    • Wafer Cleaning and Surface Preparation
    • Chemical Vapour Deposition (CVD)
    • Statistical Process Control (SPC)
  • ABOUT
  • Contact